ELEG 52103 — Integrated Circuit Fabrication Technology
Theory and techniques of integrated circuit fabrication technology; crystal growth, chemical vapor deposition, impurity diffusion, oxidation, ion implantation, photolithography and medullization. Design and analysis of device fabrication using SUPREM and SEDAN. In-process analysis techniques. Student review papers and presentations on state of the art fabrication and device technology. Prerequisite: ELEG 42003 or ELEG 52003 . (Typically offered: Irregular)
Prerequisites: ELEG 42003, ELEG 52003